A Study of CMOS MEMS Piezoelectric Inkjet Head
碩士 === 國立臺北科技大學 === 機電整合研究所 === 95 === In this thesis, we present a novel fabrication process of nano-droplet generator and micro-nozzle by CMOS process with post-process technique of MEMS. This generator includes two sections：First, we use oxide layers and metal layers to structure main body which...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/zx6t59 |