Application of CVD diamond film
碩士 === 淡江大學 === 物理學系碩士班 === 95 === Abstract: This study aims to grow diamond tips of MCD(Micro Crystalline Diamond) and UNCD(Ultra-nanocrystalline Diamond) in 2mm, 4mm, 6mm, and 8mm based on yellow light-processed silicon substrate with ASTEX 5400 and IPLAS MPCVD System, to measure the thermal diffu...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2007
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Online Access: | http://ndltd.ncl.edu.tw/handle/19306212335245047980 |