Micro Thermal Actuator Characterized with Low Driving Voltage
碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 95 === This thesis applies the materials that can achieve the effect of experiment to fabricating the thermo-buckled micro actuators working in the appropriate temperature. This study chooses parylene as major materials and successfully fabricates a novel diaphragm t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/71312451332500348633 |