Micro Thermal Actuator Characterized with Low Driving Voltage
碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 95 === This thesis applies the materials that can achieve the effect of experiment to fabricating the thermo-buckled micro actuators working in the appropriate temperature. This study chooses parylene as major materials and successfully fabricates a novel diaphragm t...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/71312451332500348633 |
| Summary: | 碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 95 === This thesis applies the materials that can achieve the effect of experiment to fabricating the thermo-buckled micro actuators working in the appropriate temperature. This study chooses parylene as major materials and successfully fabricates a novel diaphragm type thermo-buckled microactuator with only a driving voltage of 2.5V and under a working temperature below 40℃. According to the method, the study also fabricates the thermo-reversible coil-like actuators and the diaphragm type micropumps to extend its application.
The thermo-reversible coil-like actuators are a single beam structure. It can be transferred to a 3D spiral reversibly by proper heating the embedded electrodes. The term “reversibility” of this device means that the spiral device restores to the original beam structure after stopping the power supply of heating. The maximum twisting angle is 7 degrees under the heating voltage of 2.5V DC.
The diaphragm type pumps of sub-mm size driven by a low voltage without apparent temperature rise. The micropumps have the maximum flow rate of 7.05 μm /s. The fabricated thermo-buckled type micropump could be integrated into the implantable bio-sensing system for microfludic driving, and drug delivery.
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