Micro Thermal Actuator Characterized with Low Driving Voltage
碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 95 === This thesis applies the materials that can achieve the effect of experiment to fabricating the thermo-buckled micro actuators working in the appropriate temperature. This study chooses parylene as major materials and successfully fabricates a novel diaphragm t...
Main Authors: | Yue-Jheng Lin, 林岳正 |
---|---|
Other Authors: | Lung-Jieh Yang |
Format: | Others |
Language: | zh-TW |
Published: |
2007
|
Online Access: | http://ndltd.ncl.edu.tw/handle/71312451332500348633 |
Similar Items
-
Micro Bimorph Thermal Actuators and Application in Optical Attenuator
by: 林正軒
Published: (2004) -
Modeling of Scratch Drive Actuator and Performance Enhancement in Low-Voltage Region
by: Chen, Shawn, et al.
Published: (2010) -
Design and Fabrication of Micro Scratch Drive Actuator
by: Chung-ying Lin, et al.
Published: (2006) -
Low Voltage Electrostatic Actuation and Displacement Measurement through Resonant Drive Circuit
by: Park, Sangtak
Published: (2011) -
Low Voltage Electrostatic Actuation and Displacement Measurement through Resonant Drive Circuit
by: Park, Sangtak
Published: (2011)