Research of the CMOS Force Sensor with Nano Newton Resolution
碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 95 === This research proposes a novel concept to fabricate a piezoresistive micro force sensor with a sensing membrane size of 100um×100um by using standard integrated circuit foundry, TSMC 0.35um 2P4M process herein, is provided by CIC (Chip Implementation Center),...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/16765697468194200983 |