Deposition of Highly C-axis Oriented ZnO Thin Films on Diamond/Si Substrates by RF Magnetron Sputter for Surface Acoustic Wave Application
碩士 === 大同大學 === 光電工程研究所 === 95 === Among recently developed piezoelectric thin film materials, ZnO has been considered to be very promising for fabricating thin film surface acoustic wave (SAW) devices. ZnO thin films have been deposited on quartz, Si, GaAs and sapphire substrates. In these substrat...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/56200982806341144072 |