The effects of plasma pre-treatment and post-treatment on the diamond-like carbon films synthesized by RF plasma enhanced chemical vapor deposition
碩士 === 大同大學 === 材料工程學系(所) === 95 === Diamond-like carbon (DLC) films were deposited by RF plasma enhanced chemical vapor deposition and the effects of pre-treatment and post-treatment of H2 or Ar plasma and the effects of C2H2/H2 and C2H2/Ar ratios on the structure and properties of DLC films were i...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/zs66fm |