Investigation on nano-positioning control in long traveling range by bidirectional power amplifier
碩士 === 國立雲林科技大學 === 機械工程系碩士班 === 95 === In this study, a nano-positioning stage with a long traveling range has been realized by the most commonly used traditional PID control and the roller guideway. Here the laser interferometer with high resolution is applied as positioning sensor. In order to dr...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/77715059717585535362 |