Investigation on nano-positioning control in long traveling range by bidirectional power amplifier

• Main Authors: Ren-jhih Jhong, 鐘仁志
• Other Authors: Yung-Cheng Wang
• Format: Others
• Language: zh-TW
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/77715059717585535362

碩士 === 國立雲林科技大學 === 機械工程系碩士班 === 95 === In this study, a nano-positioning stage with a long traveling range has been realized by the most commonly used traditional PID control and the roller guideway. Here the laser interferometer with high resolution is applied as positioning sensor. In order to drive the stage directly by the voice coil motor for bidirectional actuation, customization power amplifier is adopted. It can output the bidirectional current and meets the requirement of voice coil motor. By Ziegler and Nichols PID parameter adjustment method and trying error methods, the parameter in different ranges can be obtained separately. This may supply the control program to find suitable parameters for the stage to reduce the errors slowly and achieve the driving finally. In order to observe its performance, we carry on the fixed-point positioning test, the step test and the ramp test. By the experimental results, a nano- positioning stage in 10 mm can be realized.