Development and Performance Measurement of a Concave Reflective Micro-Grating
碩士 === 元智大學 === 光電工程研究所 === 95 === We investigated that using ICP-RIE method to fabricate concave micro-grating. The major effort of this work is to design a process flow that is capable of fabricating a Si-based concave micro-grating. The full process flow includes the grating design process, the m...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99776392637103572528 |