Automatic Wafer Defects Analysis Using Image Processing Techniques and Neural Networks

碩士 === 元智大學 === 資訊管理學系 === 95 === Analysis of semiconductor wafer is increasingly in need of applying imaging determination, yet present process still relies partly to human visual determination for categorization. It takes time and the results are closely related to the categorization and determina...

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Bibliographic Details
Main Authors: GUAN-WEI Chen, 陳冠位
Other Authors: Hsi-Chieh Lee
Format: Others
Language:zh-TW
Published: 2007
Online Access:http://ndltd.ncl.edu.tw/handle/67941771488958117065