Design and Implementation of CMOS Sigma-Delta Force-Balance Microaccelerometers
碩士 === 國立中正大學 === 電機工程所 === 96 === In recent years, the Microelectromechanical System(MEMS) has been widely used, especially in vehicle security system, inertia, and the consuming electronic product. The integration of sensor device and interface circuits in the single substrate is the main bottlene...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/62205063954741226962 |