Application of Nano-sphere Lithography on Nb superconducting devices
碩士 === 長庚大學 === 光電工程研究所 === 96 === Recently, nano-sphere lithography (NSL) becomes a wide-used technique to make nano-structure. Nano-sphere lithography is using 2-dimensional nano-sphere array as a mask to produce large area nano-structure through deposition or etching. This thesis is concentrated...
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| Format: | Others |
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2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/02578251963634502966 |