Effect of the Physical and Electrical Characteristics of Samarium Oxide Gate Dielectrics
碩士 === 長庚大學 === 電子工程學研究所 === 96 === We studied on structural and electrical characteristic of high-k samarium oxide (Sm2O3) with three kind of gas flow ratios (Ar:O2) as the metal-oxide-semiconductor capacitance gate dielectrics by reactive RF sputtering, in this work. We analyze its electrical and...
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| Format: | Others |
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2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/76701467061524457489 |