The Study of Excimer Laser for Flat Panel Display
博士 === 長庚大學 === 電子工程學研究所 === 96 === In this thesis, excimer laser techniques for fabricating flat panel displays (FPD) are studied. Excimer laser annealing and patterning were widely application on the process of high performance thin film transistors (TFTs). High performance low temperature polycry...
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| Format: | Others |
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2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/76237615976269152331 |