Replication of Micro-structures by Soft-Mold Embossing

碩士 === 長庚大學 === 機械工程研究所 === 96 === Abstract Following the technical evolution of the Micro-Electro-Mechanical System (MEMS), manufacturing technics has continuously been innovating and microlizating, but the expensive equipment and complicated manufacturing process have always been very high thre...

Full description

Bibliographic Details
Main Authors: chien-ting Liao, 廖健廷
Other Authors: Shih-Jung Liu
Format: Others
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/82138339164013139958