Study of Silicon Nitride Barrier Layer by Plasma EnhancedChemical Vapor Deposition on Flexible Substrate
碩士 === 中原大學 === 化學工程研究所 === 96 === Flat display on plastic substrate could be lightweight, thin and flexible. However, the intrinsic high gas and water vapor permeation reduces the devices lifetime and reliability. The improvement in moisture resistance characteristics of plastic substrate should be...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/46952365808985964733 |