High Speed Low Cost Auto-focusing System for White Light Interferometer
碩士 === 中原大學 === 機械工程研究所 === 96 === Autofocussing is an important part in high speed metrology. The development made in the autofocussing system till now has not met the exact requirements for industrial applications. Consequently there is no effective design for white light interferometer with high...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/75575494797949512283 |