Applying the Sacrificial Layer Technique of MEMS Process for the Fabrication of Microfliter
碩士 === 中原大學 === 機械工程研究所 === 96 === Biochip plays an important role in biotechnology and many scientists also pay a lot of attention on this product. Due to the development of the semiconductor manufacture and the achievement of MEMS technique, the design and research of biochips have become more and...
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| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/84570868827149708497 |