Applying the Sacrificial Layer Technique of MEMS Process for the Fabrication of Microfliter
碩士 === 中原大學 === 機械工程研究所 === 96 === Biochip plays an important role in biotechnology and many scientists also pay a lot of attention on this product. Due to the development of the semiconductor manufacture and the achievement of MEMS technique, the design and research of biochips have become more and...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2008
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Online Access: | http://ndltd.ncl.edu.tw/handle/84570868827149708497 |