Application of Transient Production Equipment data on Virtual Metrologyfor Wafer Quality Control in Semiconductor Manufacturing
碩士 === 中原大學 === 機械工程研究所 === 96 === In advanced semiconductor manufacturing, both on-line stability and yield for production equipments need to be maintained. In current practice, the method for product inspection is to place the monitoring wafers into the equipments so that the wafer quality can be...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64215695902790776053 |