Applying Virtual Metrology to the Control of Overlay Error in Lithography Process
碩士 === 中原大學 === 機械工程研究所 === 96 === In recent years, with the growing of LCD industry, display panel has become a major industry in Taiwan. This study explores the application of wavelet theory in the development of virtual metrology technique for overlay run-to-run control in the TFT-LCD lithography...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/01358647070090248150 |