Study of Thin-Film Field-Effect Transistors Based on Sr-Doped Lanthanum Titanate Heterostructure
碩士 === 大葉大學 === 電機工程學系 === 96 === The oxide thin-film field-effect transistors were fabricated from epitaxial heterostructures grown on the LaAlO3(100) substrates by the off-axis rf magnetron co-sputtering system. In these devices, a strontium-doped LaTO3 (SrxLa1-xTiO3, SLTO x = 0.32~0.05) thin film...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2008
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Online Access: | http://ndltd.ncl.edu.tw/handle/48036668498354861639 |