A Study on Monte Carlo Simulation for Key Equipment Maintenance Timing Prediction in a Semiconductor Foundry
碩士 === 大葉大學 === 工業工程與科技管理學系碩士在職專班 === 96 === The semiconductor foundry had entered to dimension of the 12 inch, and procedures of the all process are over five hundred. In which contains the manufacture and measurement process, the manufacture procedure contains thin film, etching, diffusion, chemis...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/93489695886787407702 |