Investigation of photon-induced superhydrophilicity for pulsed-magnetron-sputter deposited TiO2-SiO2 thin films

碩士 === 逢甲大學 === 材料科學所 === 96 === This research uses the multi-target source ultra-high-vacuum magnetron sputtering system with use pulse direct-current power supply under the fixed Ar working pressure(PAr=2.0 Pa)to deposit the TiOx thin films, simultaneously matching the direct-current power supply...

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Bibliographic Details
Main Authors: Chun-chi Yu, 余均躋
Other Authors: Giin-shan Chen
Format: Others
Language:zh-TW
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/66703835953095150945