Investigation of photon-induced superhydrophilicity for pulsed-magnetron-sputter deposited TiO2-SiO2 thin films
碩士 === 逢甲大學 === 材料科學所 === 96 === This research uses the multi-target source ultra-high-vacuum magnetron sputtering system with use pulse direct-current power supply under the fixed Ar working pressure(PAr=2.0 Pa)to deposit the TiOx thin films, simultaneously matching the direct-current power supply...
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2008
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Online Access: | http://ndltd.ncl.edu.tw/handle/66703835953095150945 |