Investigations of Electrical Scanning Probe Microscopy on Front-end Processes of Si-based Devices
碩士 === 逢甲大學 === 電子工程所 === 96 === In this work demonstrated the influence of post-spike furnace annealing (FA) on carrier profile and electrical junctions. Using front-wing conductive tips to perform nonphotoperturbed SCM, we have observed that post-spike FA at temperatures 450°C and 400°C can enhanc...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/57378014458538659293 |