Studies of Micro-Modal Single Pole and Multi Throw Switches
碩士 === 華梵大學 === 機電工程學系博碩專班 === 96 === Four types of Micro-Modal Single Pole and Multi-Throw Switches are studied. In the analysis of design of the Switch, the advanced design package COMSOL Multi-physics is used to multi-investigate the processes of fabrication. We sputtering aluminum thin-film as e...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/74883592704611257179 |