| Summary: | 碩士 === 華梵大學 === 機電工程學系博碩專班 === 96 === Four types of Micro-Modal Single Pole and Multi-Throw Switches are studied. In the analysis of design of the Switch, the advanced design package COMSOL Multi-physics is used to multi-investigate the processes of fabrication. We sputtering aluminum thin-film as electrode, extend Micro-Modal Single-Pole-Multi-Throw Switch type A to a double-cross mode type C, besides, we made the Micro-Modal Single-Pole-Multi-Throw Switch type B into four parallel devices type D be the micro switch. By using the design of the shape of the modal electrode, the stability of the actuator can be improved and the driving voltage can be reduced by controlling the actuated modes precisely. In the analysis of this investigation, the equations of motion considering the effect of the coupling between the flexibility and the electrostatic field of the Micro-Modal Single-Pole-Multi-Throw Switch are developed. The modal equations derived by the modal expansion indicate that distributed electrostatic modal actuators can be realized through the constructed correctly modal electrodes and the specific excited mode. The developed electrostatic modal actuator can reduce the driven voltage and eliminate the spillover phenomenon. Since, the stiffness, the dynamic properties, and the stability of the system can be affected by the changes of the electric field, the effect of the electrostatic field and the shape of the electrode on the actuator are also investigated.
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