Studies of Micro-Modal Single Pole and Multi Throw Switches
碩士 === 華梵大學 === 機電工程學系博碩專班 === 96 === Four types of Micro-Modal Single Pole and Multi-Throw Switches are studied. In the analysis of design of the Switch, the advanced design package COMSOL Multi-physics is used to multi-investigate the processes of fabrication. We sputtering aluminum thin-film as e...
Main Authors: | Ju-Liang Chiu, 邱如良 |
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Other Authors: | Wei-Hsin Gau |
Format: | Others |
Language: | zh-TW |
Published: |
2008
|
Online Access: | http://ndltd.ncl.edu.tw/handle/74883592704611257179 |
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