Fabrication and Characterization of Zinc Oxide Produced by the Remote Plasma Oxidation of Thermal Evaporated Zinc
碩士 === 義守大學 === 材料科學與工程學系碩士班 === 96 === ZnO has been processed by remote plasma oxidation of thermal evaporated Zn on silicon substrate. Thermal evaporation deposition has the benefits of simplicity, low cost, capability to deposit large area thin films and the easy control of the film composition....
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/91223129276773153485 |