Study on the preparation and crystallization behavior of amorphous silicon thin films
碩士 === 義守大學 === 材料科學與工程學系碩士班 === 96 === There are four crystallization modules for a-Si thin film : solid phase crystallization (SPC) or Excimer Laser Crystallization (ELC) or metal induced lateral crystallization (MILC) or Field aided lateral crystallization (FALC). There are two parts in this the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/83390630830979555297 |