Investigation of Surface Micro/nano Wear Behavior and Characteristics of Metal Thin Film
碩士 === 崑山科技大學 === 機械工程研究所 === 96 === Along with the rapid development of industries of liquid crystal display(LCD), micro-electro-mechanical system(MEMS), and thin film solar cell, the processes of nano thin film become more and more important. However, the micro properties are not the same as macro...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/28q53v |