Effect of nitrogen flow rate on the mechanical properties of ZrN thin films
碩士 === 崑山科技大學 === 機械工程研究所 === 96 === Study of ZrN thin films coatings deposited on steel substrates (SKD11) at different nitrogen partial pressures using reactive DC magnetron sputtering. Study of Mechanical and trbological properties are on annealing fore and aft in different nitrogen rates. The fi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/q2qm36 |