Nano-Aluminum Induced Crystallization of Larger Grain Low Temperature Poly Silicon Applied for Thin Film Solar Cell
碩士 === 崑山科技大學 === 機械工程研究所 === 96 === In this paper, we fabricated polycrystalline silicon films with very large grains by the method of nanometer thick aluminum induced crystallization (nano-AIC) on the a-Si:H film deposited by plasma enhanced chemical vapor deposition (PECVD) and analyzed the best...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/kj585y |