Kinetics of the Reaction between F2 and CaO for Fluorine Removal
碩士 === 國立高雄應用科技大學 === 化學工程系碩士班 === 96 === Because of the high solubility of fluorine (F2) that emitted from the manufacture of integrated circuits, the gas can usually be removed by wet scrubbing. In this study, a dry, in-situ approach for removing fluorine by reacting with calcium oxide (CaO) has b...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/01498437251513686506 |