The Study of Optical and Electrical Properties of Nitrogen-doped Zinc Oxide Thin Films by Reactive RF Magnetron Sputtering
碩士 === 國立高雄應用科技大學 === 電子與資訊工程研究所碩士班 === 96 === In this research, the zinc nitride (Zn3N2) thin films were deposited on 1737 Corning glasses by RF reactive sputtering magnetron. The optical and electrical properties of N2-doped ZnO(p-type ZnO) thin film were be investigated by using XRD、Hall effect、P...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99662561399289014687 |