Investigation of the (Ba,Sr)TiO3 Thin Film for Tunable Microwave Device Application
碩士 === 國立高雄應用科技大學 === 電子與資訊工程研究所碩士班 === 96 === In this work, the 500 nm-thick (Ba0.6Sr0.4)TiO3 (BST) thin films were deposited by the sol-gel method on Pt/Ti/SiO2/Si substrates and then the Pt top electrodes were deposited by E-beam evaporator to from metal-insulator-metal (MIM) structures. Sol-gel...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/49881289946281171262 |