Dielectric properties for ZrTiO4-Zr5Ti7O24 thin films prepared by magnetron sputtering and annealing
碩士 === 國立高雄應用科技大學 === 模具工程系碩士班 === 96 === The dielectric thin films of ZrTiO4-Zr5Ti7O24 are intermittently deposited on Si(100) substrates by magnetic sputtering with targets of pure titanium and zirconium, The annealing processes induce the diffusion between TiO2 and ZrO2 to make the ZrTiO4 thin fi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/40056167454850800360 |