Design and Study of A Novel Process for Infrared Microbolometer on (111)-Oriented Single Crystal Silicon Wafer
碩士 === 國立高雄應用科技大學 === 光電與通訊研究所 === 96 === This study mainly focuses on infrared bolometer process and design. We propose a novel process for fabricating microbolometers by using anisotropic etching and advanced side-wall protection technique on (111)-oriented silicon wafers. Single crystalline silic...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/19892669124120412833 |