A study of LPCVD ZnO, with property improvement using surface treatment, doping, and metal catalysis techniques
碩士 === 龍華科技大學 === 工程技術研究所 === 96 === To explore nano optotronic materials with improved properties,in this study,a hot wall LPCVD system,carried out at 550~650℃, was employed to grow nanostructured zinc oxide.Three methods were used. First,the impact of plasma treatment to the PL 380 nm peak intensi...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/46833915415371448046 |