High quality ZnO films prepared by ALD at low temperatures using DEZn and nitrous oxide
碩士 === 國立中興大學 === 光電工程研究所 === 96 === In this thesis , low temperature (LT) zinc oxide (ZnO) films were prepared on c – plane sapphire substrates to explore the effect of buffer – layer annealing on the characteristic of the films . Atomic layer deposition (ALD) was employed to grow ZnO films using d...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/34238633876486555506 |