Microstructure and Characteristics of TiO2 Thin Films with Sn and Nb Doping Prepared by DC/RF Co-sputtering
博士 === 國立中興大學 === 材料科學與工程學系 === 96 === Titanium dioxide (TiO2) thin films were deposited on Si wafer and glass substrates by direct current (dc) magnetron sputtering, by which the photocatalytic phase, anatase, was obtained under the optimum deposition conditions of O2/(O2+Ar) flow ratios and substr...
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| Format: | Others |
| Language: | en_US |
| Online Access: | http://ndltd.ncl.edu.tw/handle/59518525922649297355 |