Microstructure and Characteristics of TiO2 Thin Films with Sn and Nb Doping Prepared by DC/RF Co-sputtering

博士 === 國立中興大學 === 材料科學與工程學系 === 96 === Titanium dioxide (TiO2) thin films were deposited on Si wafer and glass substrates by direct current (dc) magnetron sputtering, by which the photocatalytic phase, anatase, was obtained under the optimum deposition conditions of O2/(O2+Ar) flow ratios and substr...

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Bibliographic Details
Main Authors: Hsiao-Chiang Yao, 姚曉強
Other Authors: Fuh-Sheng Shieu
Format: Others
Language:en_US
Online Access:http://ndltd.ncl.edu.tw/handle/59518525922649297355