Design of a Low Temperature Atmospheric-Pressure Plasma with Application on Glass Surface Cleaning
碩士 === 國立中興大學 === 機械工程學系所 === 96 === Due to the increasing demands in high precision and small line width on flat panel display (FPD) device, the cleanness of the wafer surface becomes a crucial issue in the FPD industry. The atmospheric pressure plasma that possesses advantages such as no need of a...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/84673474073446575233 |