Development of PZT Microcantilever Type Actuators by Mechanical–Chemical Machining Method
碩士 === 國立中興大學 === 機械工程學系所 === 96 === In the reported literature fabrication process of PZT micro sensors and actuators were minute and complicated. For example, PZT suspended microstructures could be fabricated by sacrificial layers. Even though sacrificial etching is the standard semiconductor proc...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/52597437970484870740 |