Design and Verification of Vertical Hydride Vapor-Phase Epitaxy Reactor
碩士 === 國立中興大學 === 精密工程學系所 === 96 === HVPE manufacturing is an important stage in the process of the semiconductor manufacturing, and it is also the key technique of the semiconductor manufacturing in the recent years. In the manufacturing process, the numerical simulation analytical method is the mo...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/29950855984433595085 |