Investigation of Micro-Thermoforming Process Using Silicon Mold Fabricated by Deep Reactive Ion Etching
碩士 === 國立成功大學 === 化學工程學系碩博士班 === 96 === In this study, we investigated the micro-thermoforming process for fabrication of polymeric thin film microstructures using silicon molds. The silicon molds with high aspect ratio microstructures (HARMs) were fabricated via inductive coupled plasma-reactive io...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/22665765567902674074 |