Growth of GaN Thin Films on Porous SiC/Si and Ceramic Poly-SiC Substrates for UV Detecting Applications
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 96 === This thesis reports to grow GaN thin films on porous β-SiC (PSC) thin films, and ceramic poly-SiC substrates by MOCVD, respectively. The β-SiC thin films were deposited on Si substrates by RTCVD, and the PSC thin films were fabricated by electrochemical anod...
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/89943765423495602298 |