Fabrication and Characterization of Single-Crystalline Silicon Nanowires Prepared by Metal-Induced Etching
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 96 === In this study, a simple, fast, low-cost technique for rapidly producing large-area, aligned single-crystalline SiNW arrays on Si wafers by metal-induced etching at near room temperature were demonstrated. The etching technique shows little dependence on the...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/02575161348375047166 |