Nanoindentation Behaviour and Annealed Microstructural Evolution of Ni/Si Thin Film
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 96 === The study investigates the nano-mechanical properties of Ni/Si thin film using a nanoindentation technique. The effects of indentation depth and the annealing temperature on the microstructural evolution are also evaluated. The thin film is prepared by deposit...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/02582484961167890215 |