Fabrication Technique and Preliminary Analysis of a Tri-axis Micro-Gyroscope

碩士 === 國立成功大學 === 機械工程學系碩博士班 === 96 === The purpose of this thesis is to design and fabricate an innovative tri-axis micro-gyroscope. The proposed micro-gyroscope is capable to detect three-dimensional angular motions simultaneously, reduce coupling effect via novel mechanical design, and improve t...

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Bibliographic Details
Main Authors: Chih-Che Lin, 林志哲
Other Authors: Nan-Chyuan Tsai
Format: Others
Language:zh-TW
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/09835274390075393687